OEM News

Mahr Introduces MarSurf3D MS Optical Metrology Platform

The platform combines three powerful 3D surface measurement technologies into a single system.

The MarSurf SX3100. Photo: Mahr Inc.

Mahr Inc. has officially launched its MarSurf3D MS optical metrology platform, featuring a multisensor measuring head designed to deliver flexibility and modularity with precision. The new 3D optical platform helps manufacturers customize and configure a single measurement system that meets their specific application requirements, thereby eliminating the need to switch between instruments.

The MarSurf3D MS is capable of real-time measurements down to the sub-nanometer range with a flexible multisensor measuring head that combines three distinct area-based measuring technologies:

  • LED Confocal: The patented multi-pinhole technology ensures ultra-fast image capture with the highest signal quality, delivering maximum repeatability down to the nanometer range on nearly any surface condition.
  • White light interferometry: Offers vertical resolution in the sub-nanometer range regardless of magnification, making it ideal for measuring ultra-precise step heights and very low-roughness surfaces.
  • Focus variation with active lighting: Developed specifically for measuring the geometry of large, rough surfaces, allowing steeply inclined surfaces (up to 86°) and large vertical ranges to be captured in a single measurement.

MarSurf3D MS technology is available with a wide variety of axes off-the-shelf, ranging from 50 x 50 x 35 mm XYZ on the MX3050 portable instrument, up to 500 x 400 x 100 mm XYZ axes on the GS3501. The MarSurf3D MS SX3200 features a compact design with 200 x 75 mm XYZ axes. Built for versatility, this multifunctional tool can be used in laboratories, quality assurance environments, or directly on the production floor. It addresses a broad spectrum of manufacturing applications, including structured, rough, and smooth surfaces, steep flanks, layer thickness, and large height measuring ranges.

Key features of the MarSurf3D MS platform include:

  • Automation-ready: Measurements can be fully automated to increase throughput and reduce operator error.
  • Wide range of workpieces: Material-independent measurement of any geometry and surface characteristics, regardless of whether they are reflective, absorbent, opaque, or transparent.
  • Intuitive operation: Simple, user-guided interface with automatic modes for all significant measuring parameters, including the use of measurement protocols for known surfaces.
  • Optimal data quality: Excellent precision, accuracy, repeatability, reproducibility, and documentation to ensure traceability and auditability. 

“Historically, quality assurance and manufacturing operations had to compromise on surface inspection or invest in multiple costly, single-purpose instruments to handle different materials,” Mahr Product Manager Christian Wichern, Ph.D., stated. “The MarSurf3D MS platform changes that by combining three distinct, high-performance optical technologies into a multisensor system that brings speed, flexibility, and repeatability to 3D surface measurement.”

A member of the Mahr Group, Mahr Inc. has provided dimensional measurement solutions to fit customer application needs for more than 160 years. The company manufactures and markets various dimensional metrology equipment, from simple and easy-to-use handheld gages to technically advanced measurement systems for form, contour, surface finish , and length. Mahr also produces custom-designed gages and provides calibration and contract measurement services. Mahr Inc.’s calibration laboratories are accredited to ISO/IEC 17025:2005 NVLAP Lab Code 200605-0.

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